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首頁> 外文會議>Microfluidics, bioMEMS, and medical microsystems VII >A MEMS Flow Cytometer With Integrated Out-of-plane Microlens and 3-D Hydro-focus Unit
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A MEMS Flow Cytometer With Integrated Out-of-plane Microlens and 3-D Hydro-focus Unit

機譯：集成平面外微透鏡和3-D水力聚焦單元的MEMS流式細(xì)胞儀

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This paper presents a micro flow cytometry device fabricated using Ultra Violet (UV) lithography of the negative tone photo resist SU-8. A diamond-shaped sample injection nozzle, a three-dimensional hydro-focusing unit, and an optical detection unit with integrated out-of-plane microlens were fabricated using tilting lithography techniques. In addition to a 60° horizontal focusing angle, 30° slopes were designed and fabricated in the vertical direction of the hydro-focusing chamber. This unique design makes the hydro-focusing unit presented in this paper a truly three-dimensional one instead of the two-dimensional ones usually reported in literature. In the optical detection unit, a multi mode optical fiber was used to collect fluorescent or scattering light from the sample. To improve detection efficiency, out-of-plane microlens made of cured SU-8 polymer was imbedded in one of the outlet fluid channel walls. Numerical simulations were conducted to analyze the optical system and optimize the distances between optical elements to achieve best light coupling efficiency using commercial optical design software Zemax.
機譯：本文介紹了使用負(fù)光刻膠SU-8的紫外線（UV）光刻技術(shù)制造的微流式細(xì)胞儀。使用傾斜光刻技術(shù)制造了具有集成面外微透鏡的菱形樣品注入噴嘴，三維水聚焦單元和光學(xué)檢測單元。除了60°的水平聚焦角外，在水聚焦腔的垂直方向上還設(shè)計和制造了30°的傾斜度。這種獨特的設(shè)計使本文介紹的水聚焦裝置成為真正的三維聚焦裝置，而不是文獻(xiàn)中通常報道的二維聚焦裝置。在光學(xué)檢測單元中，多模光纖用于收集樣品的熒光或散射光。為了提高檢測效率，將由固化的SU-8聚合物制成的平面外微透鏡嵌入出口流體通道壁之一中。使用商用光學(xué)設(shè)計軟件Zemax，進(jìn)行了數(shù)值模擬，以分析光學(xué)系統(tǒng)并優(yōu)化光學(xué)元件之間的距離，以實現(xiàn)最佳的光耦合效率。

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